Large enhancement of ferroelectric polarization in Hf_0.5Zr_0.5O₂ films by low plasma energy pulsed laser deposition

Boron films produced by high energy Pulsed Laser Deposition

Micron-thick boron films have been deposited by Pulsed Laser Deposition in vacuum on several substrates at room temperature. The use of high energy pulses (>700 mJ) results in the deposition of smooth coatings with low oxygen uptake even at base pressures of 10 -4 -10 -3 Pa. A detailed structural analysis, by X-Ray Diffraction and Raman, allowed to assess the amorphous nature of the deposited f...

Fatigue mechanism of yttrium-doped hafnium oxide ferroelectric thin films fabricated by pulsed laser deposition.

Owing to their prominent stability and CMOS compatibility, HfO2-based ferroelectric films have attracted great attention as promising candidates for ferroelectric random-access memory applications. A major reliability issue for HfO2 based ferroelectric devices is fatigue. So far, there have been a few studies on the fatigue mechanism of this material. Here, we report a systematic study of the f...

Pulsed Laser Deposition of Hydroxyapatite Thin Films

Pulsed laser deposition of VO2 thin films

High quality vanadium dioxide ~VO2! thin films have been successfully deposited by pulsed laser deposition without postannealing on ~0001! and ~101̄0! sapphire substrates. X-ray diffraction reveals that the films are highly oriented with ~010! planes parallel to the surface of the substrate. VO2 thin films on ~0001! and ~101̄0! substrates show semiconductor to metal transistions with electrical r...

PULSED LASER DEPOSITION OF BaCe0.85Y0.15O3 FILMS F.W.Dynys

Pulsed laser deposition has been used to grow nanostructured BaCe0.85Y0.15O3films. The objective is to enhance protonic conduction by reduction of membrane thickness. Sintered samples and laser targets were prepared by sintering BaCe0.85Y0.15O3powders derived by solid state synthesis. Films 2 to 6 μm thick were deposited by KrF excimer laser on Si and porous Al2O3 substrates. Nanocrystalline fi...